PHYC40770 EUV Science & Technology

Academic Year 2018/2019

This module introduces the Extreme Ultraviolet (EUV) spectral region, from 1 - 100 nm, where electromagnetic radiation interacts very strongly with matter. The module explores EUV as a tool for fabricating, probing and characterising matter on the nanoscale. One key application of EUV radiation is photolithography for semiconductor manufacture. Thsi will be taken as the main example of EUV deployment for technology.

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Curricular information is subject to change

Learning Outcomes:

You will be able to explain the interaction of EUV radiation with matter, both qualitatively and quantitatively. You will calculate key parameters, explain important technological developments which depend on EUV and give examples from nanotechnology that use EUV radiation.

Student Effort Hours: 
Student Effort Type Hours
Lectures

0

Total

0

 
Requirements, Exclusions and Recommendations

Not applicable to this module.



 
Description % of Final Grade Timing
Examination: < Description >

50

2 hour End of Trimester Exam
Continuous Assessment: < Description >

50

Throughout the Trimester

Compensation

This module is not passable by compensation

Resit Opportunities

In-semester assessment

Remediation

If you fail this module you may repeat, resit or substitute where permissible

Name Role
Dr Patrick Hayden Lecturer / Co-Lecturer